CP
Cross-Section polisher (CP) is a commonly-used tool for cross-section sample preparation with ion beams.
Equipment
Figure-1. JEOL SM-09010
Specification
- ▪ Acceleration Voltage : 2 to 6 kV
- ▪ Ion Beam Diameter : 500 µm (FWHM)
- ▪ Milling Rate : 1.3µm/min
- ▪ Maximum Specimen Size : 11mm(W) x 10mm(D) x 2mm(H)
- ▪ Specimen Stage : X=ą3mm, Y=ą3mm
- ▪ Specimen Alignment : ą5°
- ▪ Gas : Argon / Pressure
- ▪ Measurement : Penning gauge
- ▪ Pumping System : TMP, RP
▍Eng. Contact Window
Msr. Chen ext.6212
E-mail : lynn_chen@msscorps.com