3D Laser confocal profile

MSS new 3D Laser confocal profile can provides non-contact, nanometerlevel profile, roughness, and film thickness information on all kinds of samples, and indicates which metrics are most critical for evaluation.

▍Equipment

Figure 1. (a) Working principle of the 3D Laser confocal profile. (b) Calculate roughness on a 2D or 3D image for a given line.

▍Feature

• • Non-destructive & non-contact analysis
• • Fit to all kinds of samples (size, height, hardness, ...etc.)
• • Fast analysis speed
• • Better spatial resolution, 0.2 um (Optical profile is 0.38 um)
• • Better vertical (z-direction) resolution
• • Can be measured with an albedo larger than 5%(perfectly for Micro Lens)
• • Can be a complementary tool to AFM

▍Applications

Figure 2. LED chip morphology

Figure 3. Cu ingot morphology

Figure 4. IC gold bump measurement

▍Eng. Contact Window

Ms.Huang ext.6218
E-mail: huini_huang@msscorps.com