Scanning Acoustic Tomography (SAT):Sonoscan Gen6

Scanning Acoustic Microscope (SAM)

The working principle of scanning acoustic microscope (SAM) is to use acoustic wave from a probe to examine internal structure of samples of interest. The acoustic wave will transmit into samples and will reflect and penetrate at layer boundaries (interfaces). These signals will be collected by the sensor and analyzed. The internal structures of sample of interest can be then obtained and exhibited on the screen. By combining images and wave information, normality or abnormality inside samples can be distinguished without damaging samples. Depending on package type, MSS offers probes with different frequencies.

  • Three main types of abnormalities can be analyzed:
  • 1. Package or Die crack
  • 2. Delamination
  • 3. Void in resin
    C-SAM Max. sample 12" wafer ∼ 30 cm×30 cm


T-SAM Max. sample 30 cm×15 cm

– General abnormal conditions :


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