SIMS

▍SIMS(Secondary Ion Mass Spectrometry)

Secondary Ion Mass Spectrometry (SIMS) is based on the sputtering of solid sample surfaces by primary ion bombardment. Primary ions impinging on the sample surface trigger a cascade of atomic collisions. A portion of the single atoms and clusters ejected are spontaneously ionized. These secondary ions are characteristic of the composition of the analyzed area. They are separated according to their mass/charge ratio. Elemental mapping or depth profiles containing quantitative information can be obtained for a selected mass.

▍Principle of SIMS Analysis

▍Applications of SIMS

• • Depth profiling of elements
• • Contamination analysis
• • Ion implantation characteristics

▍Eng. Contact Window

Ms.Huang ext.6218
E-mail: huini_huang@msscorps.com