CP

Cross-Section polisher (CP) is a commonly-used tool for cross-section sample preparation with ion beams.

▍Equipment

Figure-1. JEOL SM-09010

▍Specification

• ▪ Acceleration Voltage : 2 to 6 kV
• ▪ Ion Beam Diameter : 500 µm (FWHM)
• ▪ Milling Rate : 1.3µm/min
• ▪ Maximum Specimen Size : 11mm(W) x 10mm(D) x 2mm(H)
• ▪ Specimen Stage : X=ą3mm, Y=ą3mm
• ▪ Specimen Alignment : ą5°
• ▪ Gas : Argon / Pressure
• ▪ Measurement : Penning gauge
• ▪ Pumping System : TMP, RP

▍Eng. Contact Window

Msr. Chen ext.6212
E-mail : lynn_chen@msscorps.com