Nano Prober System

– Figure Hitachi N-6800 image

  • • Support up to 7nm process transistor electrical measurement (N6000 can only support up to 40nm)
  • • Simultaneous measurement of 6 needles at the same time (detailed specifications are listed in the table on the next page)
  • • Support low temperature measurement, – 40 °C
  • • With current amplifier can have EBIC, EBAC, and EBIRCH functions

– Spec.

– Figure N-6000 with Agilent B1500A

– Spec.


▍Eng. Contact Window

Mr. Lee ext#6858