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Nano Prober System
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Nano Prober System
– Figure Hitachi N-6800 image
• Support up to 7nm process transistor electrical measurement (N6000 can only support up to 40nm)
• Simultaneous measurement of 6 needles at the same time (detailed specifications are listed in the table on the next page)
• Support low temperature measurement, – 40 °C
• With current amplifier can have EBIC, EBAC, and EBIRCH functions
– Spec.
– Figure N-6000 with Agilent B1500A
– Spec.
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Mr. Lee ext#6858
E-mail: pfa@msscorps.com