CP is a commonly-used tool for cross-section sample preparation with ion beams. How to avoid structure deformation during preparation, especially for heterogenous materials, is a task. MSS delivers a new CP method, CEF, to decrease such effect as low as possible.
Figure 1: a) SEM image of a sample after the CEF preparation. b) Zoomin image of a) at an area marked by the green dotted rectangle. No clear curtain effect is observed. c) Higher magnification image at the Cu surface, where pristine surface roughness can be well preserved.
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