Cross-Section polisher (CP) is a commonly-used tool for cross-section sample preparation with ion beams.

▍Equipment

Figure-1. JEOL SM-09010

▍Specification 

▪  Acceleration Voltage : 2 to 6 kV                                                             

▪  Ion Beam Diameter : 500 µm (FWHM) 

▪  Milling Rate : 1.3µm/min

▪  Maximum Specimen Size : 11mm(W) x 10mm(D) x 2mm(H)

▪  Specimen Stage : X=ą3mm, Y=ą3mm

▪  Specimen Alignment : ą5°

▪  Gas : Argon / Pressure

▪  Measurement : Penning gauge

▪  Pumping System : TMP, RP

▍Eng. Contact Window  

Msr. Chen  ext.6212   

E-mail : lynn_chen@msscorps.com