Cross-Section polisher (CP) is a commonly-used tool for cross-section sample preparation with ion beams.
▍Equipment
Figure-1. JEOL SM-09010
▍Specification
▪ Acceleration Voltage : 2 to 6 kV
▪ Ion Beam Diameter : 500 µm (FWHM)
▪ Milling Rate : 1.3µm/min
▪ Maximum Specimen Size : 11mm(W) x 10mm(D) x 2mm(H)
▪ Specimen Stage : X=ą3mm, Y=ą3mm
▪ Specimen Alignment : ą5°
▪ Gas : Argon / Pressure
▪ Measurement : Penning gauge
▪ Pumping System : TMP, RP
▍Eng. Contact Window
Mr. Luo ext.6862
E-mail : aj_luo@msscorps.com