● TEM quality is competitive worldwide
● 5nm FinFET is available
● 2-3 working-day to provide TEM report (sample arrvied)
HOT! FEI Talos, OSIRIS/TEM + JOEL TEM
● FEI Talos
● FEI OSIRIS
● JEOL 2100F
TEM Analysis on Samsung S6 Mobile Phone CPU
MSS was ready to face next generation challenge and have capability to prepare ~ 5nm sample.
● Excellent High Resolution Lattice Image
● S6 DRAM EDS data
Microstructure analysis: lattice image, IC process monitor, crystal defect observation.
Phase identification and composition analysis.
a TEM inspection of the multi-metal-layer process with Cu dual-damascene structure
b IC structure observation
c High resolution TEM with the atomic scale resolution
d Grain size distribution measurement
e TEM/EDS analysis for study of Sn whisker growth, the composition distribution of Sn whisker.
TEM inspection of LED MQWs and dislocation distribution.
Eng. Contact Window
Mr. Yao ext. 6237