● TEM quality is competitive worldwide

 

● 5nm FinFET is available

 

● 2-3 working-day to provide TEM report (sample arrvied)

 

HOT!  FEI Talos, OSIRIS/TEM + JOEL TEM

 

 

 

● FEI Talos                                                                                      

 

 

● FEI OSIRIS  

 

 

 ● JEOL 2100F

 

 

TEM Analysis on Samsung S6 Mobile Phone CPU 

 

 

 

TEM capability

MSS was ready to face next generation challenge and have capability to prepare ~ 5nm sample.

 

 

TEM/EDS capability

● Excellent High Resolution Lattice Image

 

 

● S6 DRAM EDS data

 

 

 

 

 

 

Microstructure analysis: lattice image, IC process monitor, crystal defect observation.
Phase identification and composition analysis.

a  TEM inspection of the multi-metal-layer process with Cu dual-damascene structure

 

b  IC structure observation

c  High resolution TEM with the atomic scale resolution

d  Grain size distribution measurement

 

e  TEM/EDS analysis for study of Sn whisker growth, the composition distribution of Sn whisker.

    TEM inspection of LED MQWs and dislocation distribution.

 

 

---

Eng. Contact Window
Mr. Yao  ext. 6237 

E-mail:  jack_yao@msscorps.com