TEM/EDS

TEM quality is competitive worldwide

 

5nm FinFET is available

 

2-3 working-day to provide TEM report (sample arrvied)

 

HOT!  FEI Talos, OSIRIS/TEM + JOEL TEM

 

 

 

 FEI Talos                                                                                      

 

 

 FEI OSIRIS  

 

 

  JEOL 2100F

 

 

TEM Analysis on Samsung S6 Mobile Phone CPU 

 

 

 

TEM capability

MSS was ready to face next generation challenge and have capability to prepare ~ 5nm sample.

 

 

TEM/EDS capability

Excellent High Resolution Lattice Image

 

 

S6 DRAM EDS data

 

 

 

 

 

 

Microstructure analysis: lattice image, IC process monitor, crystal defect observation.
Phase identification and composition analysis.


TEM inspection of the multi-metal-layer process with Cu dual-damascene structure

 

b  IC structure observation


c  High resolution TEM with the atomic scale resolution


d  Grain size distribution measurement

 

e  TEM/EDS analysis for study of Sn whisker growth, the composition distribution of Sn whisker.

    TEM inspection of LED MQWs and dislocation distribution.

 

 


Eng. Contact Window
Mr. Yao  ext. 6237 

E-mail:  jack_yao@msscorps.com