2D 3D X-ray

3D X-ray

★reselotion down to 500nm

• Non-destructive sub-micron scale microscopy of intact samples

• Higher flux and faster scans without compromising resolution

• True spatial resolution of 500 nm with a minimum achievable voxel size of 40 nm

• High resolution across a broad range of sample types, sizes, and working distances

• In situ imaging for non-destructive characterization of microstructures in controlled environments and over time

★A14 INFO-PoP package taken by MSS 3D X-ray

▍Eng. Contact Window

Mr. Wu ext.3010

E-mail: nde@msscorps.com

The X-Ray has very short wave length and high electromagnetic radiation.

When the sample location cannot be inspected using external appearance related metrology tools, X-Ray imaging can be used to detect the internal structure of the sample due to its intensity change as a function of material density. This contrast image can show the internal structure of the sample without any physical destruction to the diagnosed region.

▍Equipment

MSS has the newest X-ray equipmet — QUADRA 7 (Nordson DAGE) and FSX-90.

Figure-1. QUADRA 7

Figure-2. FSX-90

▍Specification

▪ Sample size:45X40X10(CM)/10kg

▪ Power:30~160(KV)

▪ Maximum inclination is 70 degrees, 360 degrees rotation

▪ Resolution up to 0.1um

▪ Machine for real-time observation of images

▍Applications

▪ Defect inspection in IC packaging﹕ layer delamination, burst Crack, void, and bonding inspection.
▪  Potential defects in the PCB manufacturing process e.g.: mis-alignment, bridge or open circuit.
▪  SMT solding void inspection and measurement.
▪  Inspection of crack in high density plastic material or void in metal.
▪  Solder ball array inspection in BGA packaging and flip chip packaging.

▍Case Sharing

▪ Wire&pad burn out