#MSS new cutting-edge system for FIB circuit edit – Centrios

 

Centrios, the new generation single-beam FIB system for advanced circuit edit is ready for service in MSS. The system equipped with the new design Tomahawk WDR Ion Column and MultiChem Gas Delivery System has better performance than previous systems. With the help of five-axis, ultra-high-resolution piezo electric stage, gas-delivery system, and a high-resolution IR microscope together with GDSII CAD navigation software, precise and high-yield circuit edit jobs can be delivered down to at least 7 nm technology node both frontside and backside.

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