Hitachi Regulus 8220 is the latest generation of cold field emitter SEM(CFE-SEM). Its CFE provides ideal source for high resolution imaging with smaller energy spread, make it as a perfect tool for failure analysis, especially for advanced technology node chips.
Specifications of Hitachi Regulus 8220 and Hitachi 8220
Figure 1: Hitachi Regulus 8220 SEM low KV VC images at a) memory area and b) logic area, showing obvious contrast differences among different
contacts (CT) than previous models.
Figure 2: With superior contrast, Regulus 8220 can easily identify failures/abnormalities than previous models.
Figure 3: Regulus 8220 equipped with BSE detector can provide better view of sub-surface and abnormalities.