MSS new 3D Laser confocal profile can provides non-contact, nanometerlevel profile, roughness, and film thickness information on all kinds of samples, and indicates which metrics are most critical for evaluation.

▍Equipment

Figure 1. (a) Working principle of the 3D Laser confocal profile. (b) Calculate roughness on a 2D or 3D image for a given line.

• Non-destructive & non-contact analysis

• Fit to all kinds of samples (size, height, hardness, ...etc.)

• Fast analysis speed

• Better spatial resolution, 0.2 um (Optical profile is 0.38 um)

• Better vertical (z-direction) resolution

• Can be measured with an albedo larger than 5%(perfectly for Micro Lens)

• Can be a complementary tool to AFM 

Figure 2. LED chip morphology

Figure 3. Cu ingot morphology

Figure 4. IC gold bump measurement