3D Laser confocal profile

MSS new 3D Laser confocal profile can provides non-contact, nanometerlevel profile, roughness, and film thickness information on all kinds of samples, and indicates which metrics are most critical for evaluation.

 

 

Equipment

 

Figure 1. (a) Working principle of the 3D Laser confocal profile. (b) Calculate roughness on a 2D or 3D image for a given line.

 

 

Feature

 

• Non-destructive & non-contact analysis

• Fit to all kinds of samples (size, height, hardness, ...etc.)

• Fast analysis speed

• Better spatial resolution, 0.2 um (Optical profile is 0.38 um)

• Better vertical (z-direction) resolution

• Can be measured with an albedo larger than 5%(perfectly for Micro Lens)

• Can be a complementary tool to AFM 

 

 

Applications

 

Figure 2. LED chip morphology

 

Figure 3. Cu ingot morphology

 

Figure 4. IC gold bump measurement

 


 

Eng. Contact Window

Ms.Huang  ext.6218

E-mail: huini_huang@msscorps.com