Nano Prober System

N-6000 is a SEM-based nano probing instrument for 90-65-45(32) nm device generations. With high precision pieze-driven actuators equipped, N-6000 directly touches its fine probes on actual circuit of device, and make it possible to measure electrical characteristics of deep-submicron electrical structures, like single MOS transistor, interconnect and so on.




Figure. N-6000 with Agilent B1500A











•  Measure MOS transistor characteristics.
•  Submicron semiconductor device failure analysis.
•  MEMS Nanostructure and nanofabrication research.
•  Microelectromechanical IC microstructure research.
•  Surface science research.
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Mr. Lee  ext.6858