N-6000 is a SEM-based nano probing instrument for 90-65-45(32) nm device generations. With high precision pieze-driven actuators equipped, N-6000 directly touches its fine probes on actual circuit of device, and make it possible to measure electrical characteristics of deep-submicron electrical structures, like single MOS transistor, interconnect and so on.
Figure. N-6000 with Agilent B1500A
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