With decreasing dimension of the IC fabrication size, to have chemical information with high spatial resolution (few nanometers) becomes a task. So far, people use EDS to obtain such information. For smaller structures, however, it’s getting harder and harder to chemically resolve by EDS due to its nature and limitation. Alternatively, CS corrected TEM with EELS can provide more accurate information than EDS. Our “cold gun” TEM (JEOL) equipped with CS corrector can analysis samples not only at 200 KeV but also even down to 80 KeV. This makes it as a perfect tool for analyzing fragile samples.
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